منابع مشابه
Three Dimensional MEMS Supercapacitor Fabricated by DRIE on Silicon Substrate
Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper, we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, through-structure was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion e...
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This article presents design and fabrication methodology of Ku Band (linearly polarized) reconfigurable patch antenna. Both bulk and surface micromaching techniques are implemented on patch to have better RF performances. Reconfigurability is implemented by integrating shunt capacitive switch with microstrip patch antenna. Effect of feed mechanisms and role of micromachining on antenna paramete...
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Graphene has emerged as a promising material for active plasmonic devices in the mid-infrared (MIR) region owing to its fast tunability, strong mode confinement, and long-lived collective excitation. In order to realize on-chip graphene plasmonics, several types of graphene plasmonic waveguides (GPWGs) have been investigated and most of them are with graphene ribbons suffering from the pattern-...
متن کاملTunable coupling regimes of silicon microdisk resonators using MEMS actuators.
Tunable coupling regimes of a silicon microdisk resonator controlled by MEMS (microelectromechanical system) actuation are demonstrated for the first time. By varying the gap spacing between the waveguide and the disk, this microresonator can dynamically operate in either under-, ciritcal or over-coupling regime. The waveguide transmittance is suppressed by 30 dB in critical coupling, and the q...
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In this paper we report on full C-band tunable, 10 Gbit/s capability, directly modulated micro-electromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL) for next generation converged mobile fronthaul and backhaul applications, where the MEMS-VCSEL is used at the remote side of a wavelength routed WDM-PON system. To be compliant with the current ITU-T G.metro standardization...
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ژورنال
عنوان ژورنال: IEEE Journal of Selected Topics in Quantum Electronics
سال: 2019
ISSN: 1077-260X,1558-4542
DOI: 10.1109/jstqe.2019.2927575